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dc.contributor.author정형진-
dc.contributor.authorJ. K. Lee-
dc.contributor.authorJ. N. Whang-
dc.contributor.authorD. H. Lee-
dc.date.accessioned2024-01-13T23:04:07Z-
dc.date.available2024-01-13T23:04:07Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112542-
dc.languageEnglish-
dc.titleElectrical properties of thin polyimide films prepared by ionized cluster beam deposition.-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMat. Res. Soc. Symp. Proc. (Materials science of high temperature polymers for microelectronics), v.v. 227, pp.225 - 230-
dc.citation.titleMat. Res. Soc. Symp. Proc. (Materials science of high temperature polymers for microelectronics)-
dc.citation.volumev. 227-
dc.citation.startPage225-
dc.citation.endPage230-
dc.citation.conferencePlaceKO-
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