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Electrical properties of thin polyimide films prepared by ionized cluster beam deposition.

Authors

정형진; J. K. Lee; J. N. Whang; D. H. Lee

Citation

Mat. Res. Soc. Symp. Proc. (Materials science of high temperature polymers for microelectronics), v.v. 227, pp.225 - 230

URI

https://pubs.kist.re.kr/handle/201004/112542

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