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dc.contributor.authorPARK YOUNG JOON-
dc.contributor.author노태문-
dc.contributor.author백종태-
dc.contributor.author남기수-
dc.date.accessioned2024-01-13T23:30:51Z-
dc.date.available2024-01-13T23:30:51Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112613-
dc.languageEnglish-
dc.titleThe effects of post annealing on the electrical characteristics of thin PECVD oxide.-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProc. 2nd int'l. conf. elec. mats., pp.539 - ?-
dc.citation.titleProc. 2nd int'l. conf. elec. mats.-
dc.citation.startPage539-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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