Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | PARK YOUNG JOON | - |
dc.contributor.author | 노태문 | - |
dc.contributor.author | 백종태 | - |
dc.contributor.author | 남기수 | - |
dc.date.accessioned | 2024-01-13T23:30:51Z | - |
dc.date.available | 2024-01-13T23:30:51Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/112613 | - |
dc.language | English | - |
dc.title | The effects of post annealing on the electrical characteristics of thin PECVD oxide. | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | Proc. 2nd int'l. conf. elec. mats., pp.539 - ? | - |
dc.citation.title | Proc. 2nd int'l. conf. elec. mats. | - |
dc.citation.startPage | 539 | - |
dc.citation.endPage | ? | - |
dc.citation.conferencePlace | KO | - |
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