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The effects of post annealing on the electrical characteristics of thin PECVD oxide.

Authors

PARK YOUNG JOON; 노태문; 백종태; 남기수

Citation

Proc. 2nd int'l. conf. elec. mats., pp.539 - ?

URI

https://pubs.kist.re.kr/handle/201004/112613

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KIST Conference Paper > Others

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