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Fabrication and characterization of piezoresistive-type Si pressure microsensor

Authors

Ju Byeong Kwon; OH MYUNG HWAN

Citation

물리학회 연구논문발표회, 강릉대, pp.?

Keywords

screen printing method; piezoelectric thick films; remnant polarization

URI

https://pubs.kist.re.kr/handle/201004/112640

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KIST Conference Paper > Others

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