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dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.authorKIM Hyoung Gon-
dc.date.accessioned2024-01-13T23:32:44Z-
dc.date.available2024-01-13T23:32:44Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112724-
dc.title.alternativeN₂H₄-H₂O 용액의 최적 식각 조건을 이용한 Si diaphragm의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation전기학회 하계학술대회 , 전기연구소 ., pp.?-
dc.citation.title전기학회 하계학술대회 , 전기연구소 .-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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