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Pulsed excimer laser annealing effects of ion implanted silicon on insulator.

Authors

Kim Seong Il; Min Suk-Ki; KIM EUN KYU; Kim Yong Tae; KIM CHUN KEUN; KIM MOO SUNG

Citation

Bull. Korean phys. soc., v.v. 6, no.no. 2, pp.198 - ?

Keywords

MOCVD; GaAs; laser annealing

URI

https://pubs.kist.re.kr/handle/201004/112777

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KIST Conference Paper > Others

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