Pulsed excimer laser annealing effects of ion implanted silicon on insulator.

Authors
Kim Seong IlMin Suk-KiKIM EUN KYUKim Yong TaeKIM CHUN KEUNKIM MOO SUNG
Citation
Bull. Korean phys. soc., v.v. 6, no.no. 2, pp.198 - ?
Keywords
MOCVD; GaAs; laser annealing
URI
https://pubs.kist.re.kr/handle/201004/112777
Appears in Collections:
KIST Conference Paper > Others
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