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The backside gettering of OSF using CVD-BN

Other Titles

CVD-BN을 이용한 OSF의 backside gettering

Authors

Ju Byeong Kwon; 홍순관; Rhee Jae Seong; 김철주

Citation

전기재료 반도체 및 CAD 학술대회 논문집, 홍익대, pp.69 - 72

URI

https://pubs.kist.re.kr/handle/201004/112806

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KIST Conference Paper > Others

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