DSpace at KIST: Thermally stable, deep UV resist materials

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DC Field	Value	Language
dc.contributor.author	S. R. Turner	-
dc.contributor.author	Ahn Kwang-Duk	-
dc.contributor.author	C. G. Willson	-
dc.date.accessioned	2024-01-13T23:34:25Z	-
dc.date.available	2024-01-13T23:34:25Z	-
dc.date.created	2021-09-29	-
dc.identifier.issn	0743-0515	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112822	-
dc.language	English	-
dc.publisher	American Chemical Society	-
dc.title	Thermally stable, deep UV resist materials	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	Polymeric materials : science and engineering, proceedings of the ACS Division of Polymeric Materials, Science and Engineering, v.55, pp.608 - 609	-
dc.citation.title	Polymeric materials : science and engineering, proceedings of the ACS Division of Polymeric Materials, Science and Engineering	-
dc.citation.volume	55	-
dc.citation.startPage	608	-
dc.citation.endPage	609	-
dc.citation.conferencePlace	US	-
dc.identifier.wosid	A1986F867902923	-

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