Roadmap on ferroelectric hafnia- and zirconia-based materials and devices

Authors
Silva, Jose P. B.Alcala, RubenAvci, Uygar E.Barrett, NickBegon-Lours, LauraBorg, MattiasByun, SeungyongChang, Sou-ChiCheong, Sang-WookChoe, Duk-HyunCoignus, JeanDeshpande, VeereshDimoulas, AthanasiosDubourdieu, CatherineFina, IgnasiFunakubo, HiroshiGrenouillet, LaurentGruverman, AlexeiHeo, JinseongHoffmann, MichaelHsain, H. AlexHuang, Fei-TingHwang, Cheol SeongIniguez, JorgeJones, Jacob L.Karpov, Ilya V.Kersch, AlfredKwon, TaegyuLancaster, SuzanneLederer, MaximilianLee, YounghwanLomenzo, Patrick D.Martin, Lane W.Martin, SimonMigita, ShinjiMikolajick, ThomasNoheda, BeatrizPark, Min HyukRabe, Karin M.Salahuddin, SayeefSanchez, FlorencioSeidel, KonradShimizu, TakaoShiraishi, TakahisaSlesazeck, StefanToriumi, AkiraUchida, HiroshiVilquin, BertrandXu, XianghanYe, Kun HeeSchroeder, Uwe
Issue Date
2023-08
Publisher
American Institute of Physics Publising LLC
Citation
APL Materials, v.11, no.8
Abstract
Ferroelectric hafnium and zirconium oxides have undergone rapid scientific development over the last decade, pushing them to the forefront of ultralow-power electronic systems. Maximizing the potential application in memory devices or supercapacitors of these materials requires a combined effort by the scientific community to address technical limitations, which still hinder their application. Besides their favorable intrinsic material properties, HfO2-ZrO2 materials face challenges regarding their endurance, retention, wake-up effect, and high switching voltages. In this Roadmap, we intend to combine the expertise of chemistry, physics, material, and device engineers from leading experts in the ferroelectrics research community to set the direction of travel for these binary ferroelectric oxides. Here, we present a comprehensive overview of the current state of the art and offer readers an informed perspective of where this field is heading, what challenges need to be addressed, and possible applications and prospects for further development. (c) 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). https://doi.org/10.1063/5.0148068
Keywords
ATOMIC LAYER DEPOSITION; HF0.5ZR0.5O2 THIN-FILMS; DOPED HFO2 FILMS; NEGATIVE CAPACITANCE; ENERGY-STORAGE; PHASE-TRANSITIONS; SWITCHING KINETICS; SINGLE-CRYSTALS; DOMAIN-WALL; WAKE-UP
URI
https://pubs.kist.re.kr/handle/201004/113376
DOI
10.1063/5.0148068
Appears in Collections:
KIST Article > 2023
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