DSpace at KISTKIST Conference Paper2016

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dc.contributor.authorKang, JoonHyun-
dc.contributor.authorKuno, Yuki-
dc.contributor.authorIto, Kazuto-
dc.contributor.authorHayashi, Yusuke-
dc.contributor.authorArai, Shigehisa-
dc.contributor.authorHan, Il-Ki-
dc.contributor.authorAmemiya, Tomohiro-
dc.contributor.authorNishiyama, Nobuhiko-
dc.contributor.authorSuzuki, Junichi-
dc.date.accessioned2024-01-19T11:37:18Z-
dc.date.available2024-01-19T11:37:18Z-
dc.date.created2022-03-01-
dc.date.issued2016-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/114946-
dc.description.abstractA monolithically fabricated apodized a-Si: H grating coupler with metal mirror was demonstrated The minimum groove length for the apodized grating was more than 100 nm and measured coupling efficiency was 70%.-
dc.languageEnglish-
dc.publisherIEEE-
dc.titleHighly efficient circular holes added a-Si: H grating coupler with metal mirror for 3D optical interconnects-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation21st International Optoelectronics and Communications Conference (OECC) / International Conference on Photonics in Switching (PS)-
dc.citation.title21st International Optoelectronics and Communications Conference (OECC) / International Conference on Photonics in Switching (PS)-
dc.citation.conferencePlaceUS-
dc.citation.conferencePlaceNiigata, JAPAN-
dc.citation.conferenceDate2016-07-03-
dc.relation.isPartOf2016 21ST OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC) HELD JOINTLY WITH 2016 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING (PS)-
dc.identifier.wosid000392308800220-
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