DSpace at KIST: EUV 리소그래피 기술의 역사적 발전과 미래전망

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DC Field	Value	Language
dc.contributor.author	전영민	-
dc.date.accessioned	2024-01-19T14:04:12Z	-
dc.date.available	2024-01-19T14:04:12Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2021-07	-
dc.identifier.issn	2586-5110	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/116709	-
dc.language	Korean	-
dc.publisher	한국광학회	-
dc.title	EUV 리소그래피 기술의 역사적 발전과 미래전망	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	K-light, v.4, no.3, pp.40 - 46	-
dc.citation.title	K-light	-
dc.citation.volume	4	-
dc.citation.number	3	-
dc.citation.startPage	40	-
dc.citation.endPage	46	-
dc.description.isOpenAccess	N	-
dc.description.journalRegisteredClass	other	-
dc.subject.keywordAuthor	EUV	-
dc.subject.keywordAuthor	리소그래피	-
dc.subject.keywordAuthor	13.5nm	-
dc.subject.keywordAuthor	ASML	-

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