Fabrication of 3D thin polymer structures for hybrid sensors and actuators

Authors
Park, JKim, JRoh, DPark, SKim, BChun, K
Issue Date
2006
Publisher
IEEE
Citation
19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), pp.310 - 313
Abstract
This paper presents a novel technique to fabricate complex 3 dimensional thin polymer structures with different geometries on both sides for hybrid sensors and actuators. To realize complex 3D polymer structures, we fabricate a 3D-micromolding aligner which can make two molding masters be aligned within 2 mu m and allows applying high pressure to construct thin membrane under 10 mu m. Using this system, we make thin polymer structure with complex 3D geometries successfully. Generally, complex 3D microstructures are used in microfludics system, such as micromixers, valves and pumps. In this study, we shows a new opportunity of complex 3D structures, that is, as versatile hybrid sensors for understanding structural and functional changes of cells and as micro scale hybrid actuators that can be operated independently without any external power sources.
ISSN
1084-6999
URI
https://pubs.kist.re.kr/handle/201004/116748
Appears in Collections:
KIST Conference Paper > 2006
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