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dc.contributor.authorLEE, KR-
dc.contributor.authorBAIK, YJ-
dc.contributor.authorEUN, KY-
dc.date.accessioned2024-01-19T18:09:31Z-
dc.date.available2024-01-19T18:09:31Z-
dc.date.created2022-03-07-
dc.date.issued1993-
dc.identifier.issn0272-9172-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/119065-
dc.languageEnglish-
dc.publisherMATERIALS RESEARCH SOC-
dc.titleDEPENDENCE OF RESIDUAL-STRESS OF DIAMOND-LIKE CARBON-FILMS ON PRECURSOR GASES AND PROCESS PARAMETERS OF RF PACVD-
dc.typeConference-
dc.identifier.doi10.1557/PROC-308-101-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSymposium on Thin Films: Stresses and Mechanical Properties IV, at the 1993 Spring Meeting of the Materials-Research-Society, v.308, pp.101 - 106-
dc.citation.titleSymposium on Thin Films: Stresses and Mechanical Properties IV, at the 1993 Spring Meeting of the Materials-Research-Society-
dc.citation.volume308-
dc.citation.startPage101-
dc.citation.endPage106-
dc.citation.conferencePlaceUS-
dc.citation.conferencePlaceSAN FRANCISCO, CA-
dc.citation.conferenceDate1993-04-12-
dc.relation.isPartOfTHIN FILMS: STRESSES AND MECHANICAL PROPERTIES IV-
dc.identifier.wosidA1993BZ55E00016-
dc.identifier.scopusid2-s2.0-0027799072-
dc.type.docTypeProceedings Paper-
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