DSpace at KISTKIST Article2019

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dc.contributor.authorShin, Seung-Wook-
dc.contributor.authorKim, Jong Seon-
dc.contributor.authorKim, Seon Joon-
dc.contributor.authorKim, Dae Woo-
dc.contributor.authorJung, Hee-Tae-
dc.date.accessioned2024-01-19T19:34:01Z-
dc.date.available2024-01-19T19:34:01Z-
dc.date.created2021-09-02-
dc.date.issued2019-07-
dc.identifier.issn1226-086X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/119817-
dc.description.abstractWe demonstrate that graphene can enhance the etch resistance of polymeric hardmask significantly. Graphene oxide with a sub-micrometer diameter (nGO) was functionalized with fluorinated poly (hydroxyamide) (FPHA) via a chemical coupling reaction. The FPHA-functionalized-nGO can be dispersed in various organic solvents including methanol, cyclohexanone, dimethylformamide, and N-methyl pyrrolidone. In addition, the dispersions were spincoated to prepare hardmask films which were then thermally annealed to produce nRGO-fluorinated-polybenzoxazole (FPBO) film. Compared to pristine FPBO film, elastic modulus (122%), hardness (92%), and etch resistance (54%) were significantly enhanced at 17 wt.% graphene loading, surpassing the properties of commercial CHM009 film. (C) 2019 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.-
dc.languageEnglish-
dc.publisher한국공업화학회-
dc.titlePolybenzoxazole/graphene nanocomposite for etching hardmask-
dc.typeArticle-
dc.identifier.doi10.1016/j.jiec.2019.03.042-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJournal of Industrial and Engineering Chemistry, v.75, pp.296 - 303-
dc.citation.titleJournal of Industrial and Engineering Chemistry-
dc.citation.volume75-
dc.citation.startPage296-
dc.citation.endPage303-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART002492959-
dc.identifier.wosid000466248600034-
dc.identifier.scopusid2-s2.0-85063686080-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryEngineering, Chemical-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaEngineering-
dc.type.docTypeArticle-
dc.subject.keywordPlusGRAPHENE OXIDE-
dc.subject.keywordPlusCARBON NANOTUBES-
dc.subject.keywordPlusMEMBRANES-
dc.subject.keywordPlusRESISTANCE-
dc.subject.keywordPlusBEHAVIOR-
dc.subject.keywordPlusWATER-
dc.subject.keywordAuthorHardmask-
dc.subject.keywordAuthorComposite-
dc.subject.keywordAuthorGrapheme oxide-
dc.subject.keywordAuthorPatterning-
dc.subject.keywordAuthorEtch resistance-
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