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dc.contributor.authorJang, Joohee-
dc.contributor.authorYim, Haena-
dc.contributor.authorChoi, Ji-won-
dc.date.accessioned2024-01-19T22:02:24Z-
dc.date.available2024-01-19T22:02:24Z-
dc.date.created2021-09-03-
dc.date.issued2018-08-30-
dc.identifier.issn0040-6090-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/121015-
dc.description.abstractSi-doped SnO2/Ag/Si-doped SnO2 multilayer thin films were fabricated on flexible substrates at room temperature for indium free transparent conducting electrode. The optimal composition of Si-doped SnO2 was found by investigating electrical properties of various composition deposited by off-axis RF magnetron sputtering continuous composition spread method. Si-doped SnO2 thin films have low resistivity (0.07 Omega.cm) at doping content of Si (0.14 wt%). Si-doped SnO2/Ag/Si-doped SnO2 multilayer thin films were fabricated using optimized composition deposited by on-axis RF and DC sputtering. The optimized Si-doped SnO2/Ag/Si-doped SnO2 multilayer thin film has resistivity of 9.1x10(-5) Omega.cm and 81% transmittance in the visible region (550 nm).-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE SA-
dc.subjectTHIN-FILMS-
dc.subjectOPTICAL-PROPERTIES-
dc.subjectTRANSPARENT-
dc.subjectTIN-
dc.subjectSURFACES-
dc.titleExploration of Si-doped SnO2 composition and properties of oxide/Ag/oxide multilayers prepared using continuous composition spread by sputtering-
dc.typeArticle-
dc.identifier.doi10.1016/j.tsf.2018.05.010-
dc.description.journalClass1-
dc.identifier.bibliographicCitationTHIN SOLID FILMS, v.660, pp.606 - 612-
dc.citation.titleTHIN SOLID FILMS-
dc.citation.volume660-
dc.citation.startPage606-
dc.citation.endPage612-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000441177500082-
dc.identifier.scopusid2-s2.0-85046720886-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryMaterials Science, Coatings & Films-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle; Proceedings Paper-
dc.subject.keywordPlusTHIN-FILMS-
dc.subject.keywordPlusOPTICAL-PROPERTIES-
dc.subject.keywordPlusTRANSPARENT-
dc.subject.keywordPlusTIN-
dc.subject.keywordPlusSURFACES-
dc.subject.keywordAuthorTransparent conducting oxides-
dc.subject.keywordAuthorSi-doped SnO2/Ag/Si-doped SnO2-
dc.subject.keywordAuthorThin films-
dc.subject.keywordAuthorElectrical properties-
dc.subject.keywordAuthorOptical properties-
dc.subject.keywordAuthorRadio-frequency magnetron sputtering-
dc.subject.keywordAuthorContinuous composition spread-
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