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dc.contributor.authorLee, JinJu-
dc.contributor.authorHa, Jong-Yoon-
dc.contributor.authorYim, Haena-
dc.contributor.authorChoi, Won-Kook-
dc.contributor.authorCho, Ji-Won-
dc.date.accessioned2024-01-20T05:34:48Z-
dc.date.available2024-01-20T05:34:48Z-
dc.date.created2021-09-05-
dc.date.issued2015-11-
dc.identifier.issn1533-4880-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/124825-
dc.description.abstractThe large-area Al-doped ZnO thin films are successfully deposited at room temperature on polycarbonate substrate using a 1500 mm dual cylindrical cathodes sputtering system. Those thin films have smooth surfaces (RMS: 9.6 nm) and lower thicknesses deviation (Uniformity: 98.6%) despite of high RF power. The optical transmittance properties of 3.13 wt% Al doped ZnO thin films have above 85% in visible region. A dual cylindrical cathodes sputtering system can fabricate transparent electrode on flexible electronic devices at room temperature for mass production of 6th generation solar cell and display industry.-
dc.languageEnglish-
dc.publisherAMER SCIENTIFIC PUBLISHERS-
dc.subjectTRANSPARENT CONDUCTING ZNO-
dc.subjectELECTRICAL-PROPERTIES-
dc.subjectLAYER-
dc.subjectOXIDE-
dc.subjectTEMPERATURE-
dc.subjectGROWTH-
dc.titleCrystal Structure and Optical Properties of Al-Doped ZnO Large-Area Thin Films Using 1500 mm Dual Cylindrical Cathodes-
dc.typeArticle-
dc.identifier.doi10.1166/jnn.2015.11454-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.15, no.11, pp.8370 - 8374-
dc.citation.titleJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY-
dc.citation.volume15-
dc.citation.number11-
dc.citation.startPage8370-
dc.citation.endPage8374-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000365554700003-
dc.identifier.scopusid2-s2.0-84944931269-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusTRANSPARENT CONDUCTING ZNO-
dc.subject.keywordPlusELECTRICAL-PROPERTIES-
dc.subject.keywordPlusLAYER-
dc.subject.keywordPlusOXIDE-
dc.subject.keywordPlusTEMPERATURE-
dc.subject.keywordPlusGROWTH-
dc.subject.keywordAuthorMesoporous Tin Oxide-
dc.subject.keywordAuthorHazardous Gas Sensor-
dc.subject.keywordAuthorImpregnated Palladium-
dc.subject.keywordAuthorTransparent Conducting Oxide-
dc.subject.keywordAuthorAl-Doped ZnO-
dc.subject.keywordAuthorCylindrical Type Magnetron Cathode Source-
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