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Growth of p-Type Tin(II) Monoxide Thin Films by Atomic Layer Deposition from Bis(1-dimethylamino-2-methyl-2propoxy)tin and H2O

Authors

Han, Jeong Hwan; Chung, Yoon Jang; Park, Bo Keun; Kim, Seong Keun; Kim, Hyo-Suk; Kim, Chang Gyoun; Chung, Taek-Mo

Issue Date

2014-11-11

Publisher

AMER CHEMICAL SOC

Citation

CHEMISTRY OF MATERIALS, v.26, no.21, pp.6088 - 6091

Keywords

TIN; TRANSISTORS; OXIDES; TIN; TRANSISTORS; OXIDES

ISSN

0897-4756

URI

https://pubs.kist.re.kr/handle/201004/126123

DOI

10.1021/cm503112v

Appears in Collections:

KIST Article > 2014

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