DSpace at KISTKIST Article2014

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dc.contributor.authorLee, Hyunjoo J.-
dc.contributor.authorKim, Yanghee-
dc.contributor.authorYoon, Eui-Sung-
dc.contributor.authorCho, Il-Joo-
dc.date.accessioned2024-01-20T09:04:49Z-
dc.date.available2024-01-20T09:04:49Z-
dc.date.created2021-09-05-
dc.date.issued2014-08-
dc.identifier.issn1057-7157-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/126535-
dc.description.abstractWe present close-packed microlens arrays (MLAs) with high numerical aperture (NA) over a large range of dimensions based on glass blowing process and replication method. Polydimethylsiloxane (PDMS) MLAs with diameters from 50 mu m to 1 mm and a high NA of 0.37 (maximum achievable NA for a PDMS plano-convex lens) are demonstrated, which are difficult to achieve with the conventional methods for large microlenses. In addition, MLAs with various fill-factors up to 96.1% and different base shapes are demonstrated. By adjusting the cavity depth and the chamber pressure, the ratio of sag height and diameter can be further adjusted. [2013-0359]-
dc.languageEnglish-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.subjectFABRICATION-
dc.titleVersatile Size and Shape Microlens Arrays With High Numerical Apertures-
dc.typeArticle-
dc.identifier.doi10.1109/JMEMS.2014.2305993-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.23, no.4, pp.771 - 773-
dc.citation.titleJOURNAL OF MICROELECTROMECHANICAL SYSTEMS-
dc.citation.volume23-
dc.citation.number4-
dc.citation.startPage771-
dc.citation.endPage773-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000341573300004-
dc.identifier.scopusid2-s2.0-84905581655-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryInstruments & Instrumentation-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaInstruments & Instrumentation-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusFABRICATION-
dc.subject.keywordAuthorGlass reflow-
dc.subject.keywordAuthorhigh numerical aperture-
dc.subject.keywordAuthormicrolens arrays-
dc.subject.keywordAuthorreplication method-
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