Fabrication and analysis of butterfly-type piezoelectric actuators

Abstract

A noble butterfly-type piezoelectric actuator was designed to meet the demand of a tiny motor in mobile devices. To predict the actuation motion, we utilized the ATILA software and investigated the effects of the material properties on the impedance spectrum and the elliptical displacement. The increase of mechanical loss made the impedance peaks broader and tilted the elliptical displacement leading to asymmetry along the directions of motion. However, the decrease in the piezoelectric constant and the increase in the dielectric loss gave information about the small peak and made the shape of the elliptical displacement closer to the measured result. Even though there is discrepancy in the magnitude of value, the simulation by revising the piezoelectric constant and the dielectric loss was more effective in predicting the actuation behavior of the butterfly-type actuator.