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dc.contributor.authorJung, Mi-
dc.contributor.authorKim, Jae Hun-
dc.contributor.authorLee, Seok-
dc.contributor.authorJang, Byung Jin-
dc.contributor.authorLee, Woo Young-
dc.contributor.authorOh, Yoo-Mi-
dc.contributor.authorPark, Sun-Woo-
dc.contributor.authorWoo, Deokha-
dc.date.accessioned2024-01-20T14:31:59Z-
dc.date.available2024-01-20T14:31:59Z-
dc.date.created2021-09-05-
dc.date.issued2012-07-
dc.identifier.issn1533-4880-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/129110-
dc.description.abstractA significant enhancement in the light output from nano-patterned InP substrate covered with a nanoporous alumina mask was observed. A uniform nanohole array on an InP semiconductor substrate was fabricated by inductively coupled plasma reactive ion etching (ICP-RIE), using the nanoporous alumina mask as a shadow mask. The light output property of the semiconductor substrate was investigated via photoluminescence (PL) intensity measurement. The InP substrate with a nanohole array showed a more enhanced PL intensity compared with the raw InP substrate without a nanohole structure. After ICP-RIE etching, the light output from the nanoporous InP substrate covered with a nanoporous alumina mask showed fourfold enhanced PL intensity compared with the raw InP substrate. These results can be used as a prospective method for increasing the light output efficiency of optoelectronic devices.-
dc.languageEnglish-
dc.publisherAMER SCIENTIFIC PUBLISHERS-
dc.subject2-DIMENSIONAL PHOTONIC CRYSTAL-
dc.subjectEMITTING-DIODES-
dc.subjectEXTRACTION EFFICIENCY-
dc.subjectBAND-GAP-
dc.subjectSURFACE-
dc.subjectARRAYS-
dc.subjectFABRICATION-
dc.subjectGAAS-
dc.titleEnhanced Light Output from the Nano-Patterned InP Semiconductor Substrate Through the Nanoporous Alumina Mask-
dc.typeArticle-
dc.identifier.doi10.1166/jnn.2012.6252-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.12, no.7, pp.5747 - 5753-
dc.citation.titleJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY-
dc.citation.volume12-
dc.citation.number7-
dc.citation.startPage5747-
dc.citation.endPage5753-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000307604700116-
dc.identifier.scopusid2-s2.0-84865152486-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlus2-DIMENSIONAL PHOTONIC CRYSTAL-
dc.subject.keywordPlusEMITTING-DIODES-
dc.subject.keywordPlusEXTRACTION EFFICIENCY-
dc.subject.keywordPlusBAND-GAP-
dc.subject.keywordPlusSURFACE-
dc.subject.keywordPlusARRAYS-
dc.subject.keywordPlusFABRICATION-
dc.subject.keywordPlusGAAS-
dc.subject.keywordAuthorLight Output Efficiency-
dc.subject.keywordAuthorInP Nanohole-
dc.subject.keywordAuthorPhotoluminescence-
dc.subject.keywordAuthorNanoporous Alumina Mask-
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