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dc.contributor.authorChoo, Sung Joong-
dc.contributor.authorPark, Jung Ho-
dc.contributor.authorLee, Sangyoup-
dc.contributor.authorShin, Hyun-Joon-
dc.date.accessioned2024-01-20T15:05:20Z-
dc.date.available2024-01-20T15:05:20Z-
dc.date.created2021-09-05-
dc.date.issued2012-03-
dc.identifier.issn0374-4884-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/129459-
dc.description.abstractAn integrated Mach-Zehnder interferometric chip operating at 632.8 nm was designed and fabricated using planar rib waveguide technology for optical sensor applications. A rib waveguide with a silicon-oxynitride core layer and silicon-oxide clad layers was geometrically designed to have a single-mode operation and a high surface sensitivity by using an effective index method. A chromium mask layer was employed as an etch stop to protect the core layer of the rib waveguide and was patterned using an image reversal process with a photo mask applied to the sensor zone. The image reversal process was modified in order to obtain a longer chromium mask layer against the sensor zone. We have, therefore, established a fabrication method for an integrated Mach-Zehnder interferometric sensor without the addition of a new photo mask. The optical measurement with this device for a mixture of deionized water (DIW) and phosphate buffer solution (PBS) finally showed a sensitivity of about pi/(6.25 x 10(-4)).-
dc.languageEnglish-
dc.publisherKOREAN PHYSICAL SOC-
dc.titleAn Integrated Mach-Zehnder Interferometric Sensor Fabricated by Using Cr Mask Extension Lithography-
dc.typeArticle-
dc.identifier.doi10.3938/jkps.60.744-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.60, no.5, pp.744 - 749-
dc.citation.titleJOURNAL OF THE KOREAN PHYSICAL SOCIETY-
dc.citation.volume60-
dc.citation.number5-
dc.citation.startPage744-
dc.citation.endPage749-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART001642927-
dc.identifier.wosid000304099600013-
dc.identifier.scopusid2-s2.0-84859984008-
dc.relation.journalWebOfScienceCategoryPhysics, Multidisciplinary-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordAuthorMach-Zehnder interferometric chip-
dc.subject.keywordAuthorRib waveguide-
dc.subject.keywordAuthorSilicon-oxynitride-
dc.subject.keywordAuthorChromium mask layer-
dc.subject.keywordAuthorImage reversal process-
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