Effect of a nanoporous surface on photoluminescence from nanopatterned GaN thin films fabricated by anodic alumina templates

Abstract

GaN photonic crystal slabs on InGaN/GaN multi-quantum well light-emitting diodes have been formed by dry etching using nanoporous anodic alumina templates, which have a periodic lattice constant of 105 nm and a hole diameter of 45 nm. The photonic crystal slab shows an enhanced intensity of photoluminescence due to the nanohole pattern array producing Fabry-Perot like interference. A rough surface of nanoholes results in a broad spectrum with a small oscillation, and well-ordered multiple facets of nanoholes results in a relatively sharp spectrum with a large oscillation.