Indium tin Oxide (ITO) coatings fabricated using mixed ITO sols

Authors
Cheong, D.-S.Yun, D.H.Park, S.H.Kim, C.-S.
Issue Date
2009-11
Citation
Journal of the Korean Ceramic Society, v.46, no.6, pp.708 - 712
Abstract
ITO films were achieved by sintering at 500∼550°C. This was possible by inducing a seeding effect on an ITO sol by producing crystalline ITO nanoparticles in situ during heat treatment. Two kinds of ITO sols (named ITO-A and ITO-B) were prepared at 2.0 wt% from indium acetate and tin(IV) chloride in different mixed solvents. The ITO-A sol showed a high degree of crystallinity of ITO without any detectable SnO2 on XRD at 350°C/1 h, but the ITO-B sol showed a small amount of SnO2 even after annealing at 600°C/1 h. The 10 wt% ITO-A//ITO-B showed the sheet resistance of 3600Ω/□ , while the ITO-B sol alone showed 5200 Ω/□ by sintering at 550oC for 30 min. Processing parameters were studied by TG/DSC, XRD, SEM, sheet resistance, and visible transmittance.
Keywords
In-situ; ITO thin films; Mixed sol; Sol-gel coating; Solvent effect; Chlorine compounds; Coatings; Electric resistance; Gels; Indium; Indium compounds; Organometallics; Sheet resistance; Sintering; Sol-gel process; Sol-gels; Sols; Solvents; Thin films; Tin; Tin oxides; Titanium compounds; ITO glass; In-situ; ITO thin films; Mixed sol; Sol-gel coating; Solvent effect; Chlorine compounds; Coatings; Electric resistance; Gels; Indium; Indium compounds; Organometallics; Sheet resistance; Sintering; Sol-gel process; Sol-gels; Sols; Solvents; Thin films; Tin; Tin oxides; Titanium compounds; ITO glass; In situ seeding; ITO thin film; Mixed sol; Sol-gel coating; Solvent effect
ISSN
1229-7801
URI
https://pubs.kist.re.kr/handle/201004/132021
DOI
10.4191/KCERS.2009.46.6.708
Appears in Collections:
KIST Article > 2009
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