DSpace at KISTKIST Article2009

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dc.contributor.author조경선-
dc.contributor.author윤성호-
dc.contributor.author정훈-
dc.contributor.author채수호-
dc.contributor.author임광영-
dc.contributor.author김영욱-
dc.contributor.author박상환-
dc.date.accessioned2024-01-20T22:01:43Z-
dc.date.available2024-01-20T22:01:43Z-
dc.date.created2022-01-10-
dc.date.issued2009-02-
dc.identifier.issn1226-976X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/132755-
dc.title반도체 제조 공정용 SiC 소재 기술-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation세라미스트, v.12, no.1, pp.33 - 48-
dc.citation.title세라미스트-
dc.citation.volume12-
dc.citation.number1-
dc.citation.startPage33-
dc.citation.endPage48-
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