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Photolithographic Silicon Patterns with Z-DOL (perfluoropolyether, PFPE) Coating as Tribological Surfaces for Miniaturized Devices

Authors

Arvind Singh; Pham Duc Cuong; 윤의성

Issue Date

2008-12

Publisher

The Korean society of tribologists & lubrication engineers

Citation

KSTLE: international journal / The Korean society of tribologists & lubrication engineers, v.9, no.1-2, pp.10 - 12

Keywords

silicon; micro; patterns; friction; tribology

ISSN

1229-9189

URI

https://pubs.kist.re.kr/handle/201004/132900

Appears in Collections:

KIST Article > 2008

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