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dc.contributor.authorShin, J. W.-
dc.contributor.authorNo, Y. S.-
dc.contributor.authorKim, T. W.-
dc.contributor.authorChoi, W. K.-
dc.date.accessioned2024-01-20T22:33:46Z-
dc.date.available2024-01-20T22:33:46Z-
dc.date.created2021-09-03-
dc.date.issued2008-10-
dc.identifier.issn1533-4880-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/133096-
dc.description.abstractLocally distributed crystalline ZnSiO3 nanoparticles embedded in a SiO2 layer inserted between the ZnO thin film and the Si substrate were formed using transmission electron microscopy (TEM) with a focused electron beam irradiation process. High-resolution TEM (HRTEM) images and energy dispersive X-ray spectroscopy (EDS) profiles showed that ZnSiO3 nanocrystals with a size of approximately 6 nm were formed in the SiO2 layer. The formation mechanisms of the ZnSiO3 nanocrystals in the SiO2 layer are described on the basis of the HRTEM images and the EDS profiles.-
dc.languageEnglish-
dc.publisherAMER SCIENTIFIC PUBLISHERS-
dc.subjectSTIMULATED DESORPTION-
dc.subjectTRANSISTORS-
dc.titleFormation and Microstructural Properties of Locally Distributed ZnSiO3 Nanoparticles Embedded in a SiO2 Layer by Using a Focused Electron Beam-
dc.typeArticle-
dc.identifier.doi10.1166/jnn.2008.1349-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.8, no.10, pp.5566 - 5570-
dc.citation.titleJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY-
dc.citation.volume8-
dc.citation.number10-
dc.citation.startPage5566-
dc.citation.endPage5570-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000261390500140-
dc.identifier.scopusid2-s2.0-58149238158-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle; Proceedings Paper-
dc.subject.keywordPlusSTIMULATED DESORPTION-
dc.subject.keywordPlusTRANSISTORS-
dc.subject.keywordAuthorZnSiO3 Nanocrystal-
dc.subject.keywordAuthorZnO Thin Film-
dc.subject.keywordAuthorSi Substrate-
dc.subject.keywordAuthorFocused Electron Beam-
dc.subject.keywordAuthorNanocrystal Formation Mechanism-
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KIST Article > 2008
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