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dc.contributor.authorWi, Jung-Sub-
dc.contributor.authorLee, Tae-Yon-
dc.contributor.authorKim, Hyun-Mi-
dc.contributor.authorLee, Hyo-Sung-
dc.contributor.authorNam, Sung-Wook-
dc.contributor.authorShin, Il Jae-
dc.contributor.authorShin, Kyung Ho-
dc.contributor.authorKim, Ki-Bum-
dc.date.accessioned2024-01-21T00:05:15Z-
dc.date.available2024-01-21T00:05:15Z-
dc.date.created2021-09-02-
dc.date.issued2007-11-05-
dc.identifier.issn0935-9648-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/133987-
dc.description.abstractA method for forming sub-10 nm silicide dots is reported. Crystalline Pd2Si dots with a diameter of approximately 8 nm are formed on a pattern with a scale of a few tens of nanometers defined by electron-beam lithography (see figure, scale bar is 200 nm).-
dc.languageEnglish-
dc.publisherWILEY-V C H VERLAG GMBH-
dc.subjectHYDROGEN SILSESQUIOXANE-
dc.subjectLASER-BEAM-
dc.subjectNANOPARTICLES-
dc.subjectNANOLITHOGRAPHY-
dc.subjectNANOCRYSTALS-
dc.titleGuided formation of a sub-10 nm silicide dot array on an area patterned by electron-beam lithography-
dc.typeArticle-
dc.identifier.doi10.1002/adma.200701043-
dc.description.journalClass1-
dc.identifier.bibliographicCitationADVANCED MATERIALS, v.19, no.21, pp.3469 - +-
dc.citation.titleADVANCED MATERIALS-
dc.citation.volume19-
dc.citation.number21-
dc.citation.startPage3469-
dc.citation.endPage+-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000250992000005-
dc.identifier.scopusid2-s2.0-36249004923-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryChemistry, Physical-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusHYDROGEN SILSESQUIOXANE-
dc.subject.keywordPlusLASER-BEAM-
dc.subject.keywordPlusNANOPARTICLES-
dc.subject.keywordPlusNANOLITHOGRAPHY-
dc.subject.keywordPlusNANOCRYSTALS-
dc.subject.keywordAuthordot array-
dc.subject.keywordAuthorsilicide-
dc.subject.keywordAuthore-beam lithography-
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