DSpace at KISTKIST Article2007

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dc.contributor.author박상환-
dc.contributor.author이동윤-
dc.contributor.author한재호-
dc.contributor.author윤성호-
dc.contributor.author조경선-
dc.date.accessioned2024-01-21T00:34:24Z-
dc.date.available2024-01-21T00:34:24Z-
dc.date.created2022-01-10-
dc.date.issued2007-08-
dc.identifier.issn1226-976X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/134216-
dc.title반도체 제조공정용 탄화규소 부품/소재 기술-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation세라미스트, v.10, no.4, pp.38 - 53-
dc.citation.title세라미스트-
dc.citation.volume10-
dc.citation.number4-
dc.citation.startPage38-
dc.citation.endPage53-
dc.subject.keywordAuthor반도체 공정-
dc.subject.keywordAuthor탄화규소-
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KIST Article > 2007
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