DSpace at KISTKIST Article2007

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dc.contributor.author장희연-
dc.contributor.author박종극-
dc.contributor.author이욱성-
dc.contributor.author백영준-
dc.contributor.author임대순-
dc.contributor.author정증현-
dc.date.accessioned2024-01-21T01:04:51Z-
dc.date.available2024-01-21T01:04:51Z-
dc.date.created2022-01-10-
dc.date.issued2007-04-
dc.identifier.issn1225-8024-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/134474-
dc.languageKorean-
dc.publisher한국표면공학회-
dc.title입방정 질화붕소 박막의 잔류응력 형성에 미치는 산소 첨가 효과-
dc.title.alternativeEffect of Oxygen Addition on Residual Stress Formation of Cubic Boron Nitride Thin Films-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국표면공학회지, v.40, no.2, pp.32 - 97-
dc.citation.title한국표면공학회지-
dc.citation.volume40-
dc.citation.number2-
dc.citation.startPage32-
dc.citation.endPage97-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART001187763-
dc.subject.keywordAuthorresidual stress-
dc.subject.keywordAuthornucleation-
dc.subject.keywordAuthorCubic boron nitride-
dc.subject.keywordAuthoroxygen addition-
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KIST Article > 2007
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