DSpace at KISTKIST Article2007

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dc.contributor.author이승훈-
dc.contributor.author추성일-
dc.contributor.author김진혁-
dc.contributor.author한동철-
dc.contributor.author문성욱-
dc.date.accessioned2024-01-21T01:06:45Z-
dc.date.available2024-01-21T01:06:45Z-
dc.date.created2022-01-10-
dc.date.issued2007-03-
dc.identifier.issn1738-9895-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/134552-
dc.publisher한국신뢰성학회-
dc.titleReliable design and electrical characteristics of vertical MEMS probe tip-
dc.title.alternative수직형 MEMS 프로브 팁의 신뢰성 설계 및 전기적 특성평가-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국신뢰성학회지: 신뢰성응용연구, v.7, no.1, pp.23 - 29-
dc.citation.title한국신뢰성학회지: 신뢰성응용연구-
dc.citation.volume7-
dc.citation.number1-
dc.citation.startPage23-
dc.citation.endPage29-
dc.subject.keywordAuthorreliable design-
dc.subject.keywordAuthorprobe-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthorcontact resistance-
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KIST Article > 2007
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