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dc.contributor.authorKim, Hyun-Jun-
dc.contributor.authorKim, Dal-Young-
dc.contributor.authorHa, Jong-Yoon-
dc.contributor.authorKang, Chong-Yun-
dc.contributor.authorSung, Man Young-
dc.contributor.authorCho, Bong Hee-
dc.contributor.authorYoon, Seok-Jin-
dc.contributor.authorKim, Hyun-Jai-
dc.date.accessioned2024-01-21T02:02:16Z-
dc.date.available2024-01-21T02:02:16Z-
dc.date.created2021-09-01-
dc.date.issued2006-12-
dc.identifier.issn1385-3449-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/134905-
dc.description.abstractFerroelectric lithium niobate (LiNbO3) thin films were epitaxially fabricated on sapphire (0001) and polycrystalline diamond substrates using pulsed laser deposition (PLD). Various deposition conditions are investigated to realize deposition of c-axis oriented LiNbO3 thin film. The LiNbO3 thin films were chemically etched after electric poling, being investigated by scanning electron microscope (SEM).-
dc.languageEnglish-
dc.publisherSPRINGER-
dc.subjectPULSED-LASER DEPOSITION-
dc.subjectLITHIUM-NIOBATE-
dc.subjectEPITAXIAL-GROWTH-
dc.titleDeposition of LiNbO3 thin films for selective etching-
dc.typeArticle-
dc.identifier.doi10.1007/s10832-006-0467-z-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF ELECTROCERAMICS, v.17, no.2-4, pp.933 - 935-
dc.citation.titleJOURNAL OF ELECTROCERAMICS-
dc.citation.volume17-
dc.citation.number2-4-
dc.citation.startPage933-
dc.citation.endPage935-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000243610600146-
dc.identifier.scopusid2-s2.0-33847201206-
dc.relation.journalWebOfScienceCategoryMaterials Science, Ceramics-
dc.relation.journalResearchAreaMaterials Science-
dc.type.docTypeArticle; Proceedings Paper-
dc.subject.keywordPlusPULSED-LASER DEPOSITION-
dc.subject.keywordPlusLITHIUM-NIOBATE-
dc.subject.keywordPlusEPITAXIAL-GROWTH-
dc.subject.keywordAuthorferroelectric-
dc.subject.keywordAuthorselective etching-
dc.subject.keywordAuthorLiNbO3-
dc.subject.keywordAuthorPLD-
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