Characteristics of PMW-PNN-PT-PZ thick films on various bottom electrodes

Abstract

Characteristics of piezoelectric thick films on various bottom electrodes prepared by screen printing method were investigated. The composition of the ceramics used in this study was 0.01Pb(Mg1/2W1/2)O-3-0.41Pb(Ni1/3Nb2/3)O-3-0.35PbTiO(3)-0.23PbZrO(3) + 0.1wt% Y2O3 +2.0 wt.%ZnO(PMW-PNN-PT-PZ). The Ag and the Ag-Pd electrodes were coated on SiO2/Si substrate by screen printing method and Pt electrode was deposited on Ti/ SiO2/Si substrate by DC sputtering system. The piezoelectric PMW-PNN-PT-PZ thick films were fabricated on each electrode and annealed by rapid thermal annealing (RTA). The PMW-PNN-PT-PZ piezoelectric thick films on Ag/SiO2/Si has higher remanent polarization (P-r) of 22.4 mu C/cm(2).