DSpace at KISTKIST Article2006

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dc.contributor.author전명석-
dc.contributor.author이상순-
dc.contributor.author김태하-
dc.contributor.author김다영-
dc.date.accessioned2024-01-21T02:06:05Z-
dc.date.available2024-01-21T02:06:05Z-
dc.date.created2021-09-06-
dc.date.issued2006-10-
dc.identifier.issn0304-128X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/135061-
dc.publisher한국화학공학회-
dc.title마이크로 칩 전기영동에 응용하기 위한 다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작-
dc.title.alternativeMEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitationKorean Chemical Engineering Research(HWAHAK KONGHAK), v.44, no.5, pp.513 - 519-
dc.citation.titleKorean Chemical Engineering Research(HWAHAK KONGHAK)-
dc.citation.volume44-
dc.citation.number5-
dc.citation.startPage513-
dc.citation.endPage519-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART001025581-
dc.subject.keywordAuthorMEMS Fabrication-
dc.subject.keywordAuthorMicrochip Electrophoresis-
dc.subject.keywordAuthorQuartz-
dc.subject.keywordAuthorGlass-
dc.subject.keywordAuthorPoly-Silicon-
dc.subject.keywordAuthorEtching-
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KIST Article > 2006
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