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마이크로 칩 전기영동에 응용하기 위한 다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작

Other Titles

MEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis

Authors

전명석; 이상순; 김태하; 김다영

Issue Date

2006-10

Publisher

한국화학공학회

Citation

Korean Chemical Engineering Research(HWAHAK KONGHAK), v.44, no.5, pp.513 - 519

Keywords

MEMS Fabrication; Microchip Electrophoresis; Quartz; Glass; Poly-Silicon; Etching

ISSN

0304-128X

URI

https://pubs.kist.re.kr/handle/201004/135061

Appears in Collections:

KIST Article > 2006

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