기상휘발법에 의한 이산화규소 나노와이어의 성장에 미치는 가스의 영향

Abstract

Effects of gases to growth of SiO2 nanowires were characterized. N2, Ar, and O2 gas's effect were determined. SiO2 nanowires growth scheme was varied by kind and flow rates of gases because of amounts of O2. Flow rates of gases and kind of substrates affected nanowires' diameters, lengths and morphologies of grown nono wires. With increasing flow rates of gases, nanowire's diameter increased because of additional VS and SLS reactions. By TEM characterization, We knonws that, grown SiO2 nanowires on Si substrate showed two shell structures. These shapes of nanowires were formed by reaction of additional SLS growth. Grown SiO2 nanowires showed blue luminescence by PL characterization These Blue luminescence was due to quantum confinement effect and oxygen vacancies in the nanowires.