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dc.contributor.authorShin, SD-
dc.contributor.authorKim, DW-
dc.contributor.authorKim, DK-
dc.contributor.authorKim, DY-
dc.date.accessioned2024-01-21T05:34:20Z-
dc.date.available2024-01-21T05:34:20Z-
dc.date.created2021-09-01-
dc.date.issued2005-02-01-
dc.identifier.issn0022-0248-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/136752-
dc.description.abstractIn this study. the microstructure and property of poly-Si film, deposited using hot wire chemical vapor deposition (HWCVD) were investigated. A consequence of the low a-Si content in the poly-Si film was crystallites with well developed facets. The crystallite morphology was rhombic pyramidal while EBSD analysis revealed the existence of (1 1 1) contact twin planes. The facets of the rhombic pyramidal crystallites were based oil {3 2 0} and {3 2 0}* planes, which have Sigma3 twin relationship with respect to (1 1 1) contact twin plane. (C) 2004 Published by Elsevier B.V.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE BV-
dc.subjectCHEMICAL-VAPOR-DEPOSITION-
dc.subjectFLATTENED DIAMOND CRYSTALS-
dc.subjectHOT-WIRE CVD-
dc.subjectMICROCRYSTALLINE SILICON-
dc.subjectSOLAR-CELLS-
dc.subjectSI-
dc.subjectMECHANISM-
dc.titleCrystal growth in the low-temperature deposition of polycrystalline silicon thin film-
dc.typeArticle-
dc.identifier.doi10.1016/j.jcrysgro.2004.10.151-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJOURNAL OF CRYSTAL GROWTH, v.274, no.3-4, pp.347 - 354-
dc.citation.titleJOURNAL OF CRYSTAL GROWTH-
dc.citation.volume274-
dc.citation.number3-4-
dc.citation.startPage347-
dc.citation.endPage354-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000226704900003-
dc.relation.journalWebOfScienceCategoryCrystallography-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaCrystallography-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusCHEMICAL-VAPOR-DEPOSITION-
dc.subject.keywordPlusFLATTENED DIAMOND CRYSTALS-
dc.subject.keywordPlusHOT-WIRE CVD-
dc.subject.keywordPlusMICROCRYSTALLINE SILICON-
dc.subject.keywordPlusSOLAR-CELLS-
dc.subject.keywordPlusSI-
dc.subject.keywordPlusMECHANISM-
dc.subject.keywordAuthorEBSD-
dc.subject.keywordAuthorrhombic pyramid-
dc.subject.keywordAuthortwin-
dc.subject.keywordAuthorHWCVD-
dc.subject.keywordAuthorpoly-Si-
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