DSpace at KISTKIST Article2005

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dc.contributor.authorPark, YJ-
dc.contributor.authorLee, JY-
dc.contributor.authorYoum, MS-
dc.contributor.authorKim, YT-
dc.date.accessioned2024-01-21T05:41:27Z-
dc.date.available2024-01-21T05:41:27Z-
dc.date.created2021-09-05-
dc.date.issued2005-01-
dc.identifier.issn0021-4922-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/136883-
dc.description.abstractThe Ge2Sb2Te5 thin films deposited by a sputtering method on a SiO2/Si substrate were annealed. and subjected to transmission electron microscopy in order to investigate the crystallization and growth of the metastable Ge2Sb2Te5. The metastable Ge2Sb2Te5 was initially crystallized with 10-nm-sized grains and its sheet resistance was still as high as in the amorphous state. Sheet resistance was abruptly decreased at the grain growth stage after the crystallization.-
dc.languageEnglish-
dc.publisherJAPAN SOC APPLIED PHYSICS-
dc.subjectTHIN-FILMS-
dc.subjectCRYSTAL NUCLEATION-
dc.subjectMICROSCOPY-
dc.titleEffects of annealing conditions on the crystallization and grain growth of metastable Ge2Sb2Te5-
dc.typeArticle-
dc.identifier.doi10.1143/JJAP.44.326-
dc.description.journalClass1-
dc.identifier.bibliographicCitationJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.44, no.1A, pp.326 - 327-
dc.citation.titleJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS-
dc.citation.volume44-
dc.citation.number1A-
dc.citation.startPage326-
dc.citation.endPage327-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000226996600069-
dc.identifier.scopusid2-s2.0-15544388076-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusTHIN-FILMS-
dc.subject.keywordPlusCRYSTAL NUCLEATION-
dc.subject.keywordPlusMICROSCOPY-
dc.subject.keywordAuthorGe2Sb2Te5-
dc.subject.keywordAuthorTEM-
dc.subject.keywordAuthorrapid thermal annealing-
dc.subject.keywordAuthorcrystallization-
dc.subject.keywordAuthorgrain growth-
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