Variable optical attenuator using parallel plate electrostatic actuator
- Authors
- HUR JAE SUNG; 김태엽; Shin, HJ; Moon, S; Choi, IH; Son, CS
- Issue Date
- 2004-12
- Publisher
- 한국물리학회
- Citation
- Journal of the Korean Physical Society, v.45, pp.S933 - S935
- Abstract
- A micromachined variable optical attenuator (VOA) has been investigated. The VOA has two single mode fibers (SMFs) aligned with free space and a symmetric parallel-plate actuator with micro-shutter, which can control an amount of light by driving the actuator. In the work, the analysis of driving and optical performance of the VOA was performed, and the pull-in voltage could be reduced by decreasing the displacement of actuating range. The VOA that consistes of driving electrode, ground electrode, actuating micro-shutter, and mechanical stopper, was fabricated by using the Bosch deep silicon etching process with silicon-on-insulator (SOI) wafer. The actuating shutter was driven by electrostatic force. The threshold voltage of actuating shutter was close to 28 and 46 V at a spring width of 5 mum and 7 mum, respectively.
- Keywords
- VOA; parallel-plate actuator; micro-shutter
- ISSN
- 0374-4884
- URI
- https://pubs.kist.re.kr/handle/201004/136999
- Appears in Collections:
- KIST Article > 2004
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