Electrical characterization of InGaN/GaN quantum dots by deep level transient spectroscopy

Abstract

We have investigated the electrical property of InGaN quantum dots (QDs) embedded in GaN layer using capacitance-voltage and deep-level transient spectroscopy (DLTS) measurements. The apparent activation energy was observed 0.43 eV below the conduction band edge of barrier layers in InGaN/GaN QDs . The capture barrier height of InGaN QDs was measured more than about 0.17 eV, showing the existence of strain between QDs and barrier layers. Thus, the bound state of QDs was estimated as 0.26 eV apart from the conduction band edge of the GaN.