적층형 압전밸브의 설계, 제작 및 특성

Abstract

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramicactuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuatordie and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement,respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimizedconditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was alsoanodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was alsobonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 Vwith a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was 3.03 10-8 pa m3/cm2. Therefore, thefabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and airtransportation industry.