Nano-positioning system using linear ultrasonic motor with "shaking beam"

Abstract

In this paper the ultrasonic linear motor based on shaking beam and nano-positioning mechanical system were investigated. The advantages of the ultrasonic linear motor are high resolution, no magnetic noise generation due to the DC characteristics of the piezoelectric device, high servo rigidity, high holding torque and none additional brake system. It was confirmed that ultrasonic linear motor is suitable for nano-motion positioning with various speeds at close-loop control. The ultrasonic linear motor based on shaking beam was described and the nano-positioning systems using the ultrasonic linear motor were investigated.