Compound linear ultrasonic motor based on shaking beam

Abstract

The transformation of high-frequency vibrations of piezoelectric elements into continuous linear motion of a slider is one of the main tasks of a linear piezoelectric motor. To produce a high thrust force in the piezoelectric linear actuator, we proposed the compound piezoelectric linear actuator based on a "shaking beam" excited by two sources of longitudinal mechanical vibrations shifted by pi/2. The compound actuator consists of two shaking beams and is rigidly fastened. The finite element method (FEM) was used to define structural and electrical boundary conditions for the compound piezoelectric actuator. FEM analysis showed that the compound actuator's trajectory was elliptical. Experimental research has shown that the compound piezoelectric actuator has high thrust force.