Characteristics of rapid-thermal-annealed LiNi1-xCoxO2 cathode films for all-solid-state rechargeable thin film microbatteries

Authors
Kim, HKSeong, TYYoon, YS
Issue Date
2004-01
Publisher
ELSEVIER SCIENCE SA
Citation
THIN SOLID FILMS, v.447, pp.619 - 625
Abstract
We report on the characteristics of rapid-thermal-annealed LiNi1-xCoxO2 cathode films for all-solid-state thin film microbatteries (TFBs). Scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy results show that the surface oxide layer formed on the as-deposited LiNi1-xCoxO2 film is completely removed by a rapid thermal annealing process. All-solid-state TFBs consisting of Li/LiPON/LiNi1-xCoxO2/Pt/MgO/Si exhibit stable cyclibility and a high specific discharge capacity of 60.2 muAh/cm(2) mum. It is concluded that the LiyNi1-xCoxO2 cathode could represent a promising candidate for a cathode film in TFBs. (C) 2003 Elsevier B.V. All rights reserved.
Keywords
LINIO2; MICROSTRUCTURES; PERFORMANCE; FABRICATION; ELECTRODES; LICOO2; LiNi1-xCoxO2; rapid thermal annealing; thin film microbattery; capacity; cyclibility
ISSN
0040-6090
URI
https://pubs.kist.re.kr/handle/201004/137949
DOI
10.1016/j.tsf.2003.07.024
Appears in Collections:
KIST Article > 2004
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