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Growth of SiC nanorod using single precursor

Other Titles

단일전구체를 이용한 SiC 나노로드의 성장

Authors

노대호; 김재수; 변동진; 양재웅; 김나리

Issue Date

2003-09

Citation

대한금속ㆍ재료학회지 = J. Kor. Inst. Met. & Mater., v.41, no.9, pp.600 - 605

Keywords

SiC nanorod; HMDS; CVD; Ni

URI

https://pubs.kist.re.kr/handle/201004/138262

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KIST Article > 2003

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