Formation of WSi2-SiC nanocomposite coating by carburizing process followed by reactive diffusion of Si on W substrate

Abstract

A WSi2/(19.3-32.9) vol.% beta-SiC nanocomposite coating was formed by chemical vapor deposition of Si on the W-carbide layers. The nanocomposite coating consisted of the equiaxed WSi2 grains with the average size of 88-153 nm and the beta-SiC particles with the average size of 37-65 nm, which were mostly located at the grain boundaries Of WSi2 (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.