Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 문성욱 | - |
dc.date.accessioned | 2024-01-21T08:36:01Z | - |
dc.date.available | 2024-01-21T08:36:01Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 2003-07 | - |
dc.identifier.issn | 1227-741X | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/138411 | - |
dc.title | 일본의 마이크로 / 나노 기술 동향 | - |
dc.type | Article | - |
dc.description.journalClass | 3 | - |
dc.identifier.bibliographicCitation | 월간 반도체, v.v. 7, pp.26 - 38 | - |
dc.citation.title | 월간 반도체 | - |
dc.citation.volume | v. 7 | - |
dc.citation.startPage | 26 | - |
dc.citation.endPage | 38 | - |
dc.subject.keywordAuthor | 마이크로 | - |
dc.subject.keywordAuthor | 나노 기술 | - |
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