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dc.contributor.author문성욱-
dc.date.accessioned2024-01-21T08:41:18Z-
dc.date.available2024-01-21T08:41:18Z-
dc.date.created2022-01-10-
dc.date.issued2003-06-
dc.identifier.issn1227-741X-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/138506-
dc.title미국 동부지역 마이크로 / 나노 기술 동향-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation월간 반도체, v.v. 6, pp.30 - 39-
dc.citation.title월간 반도체-
dc.citation.volumev. 6-
dc.citation.startPage30-
dc.citation.endPage39-
dc.subject.keywordAuthor마이크로-
dc.subject.keywordAuthor나노 기술-
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