DSpace at KIST: A study on the low temperature growth of SiC film with a 1,3-DSB precursor

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DC Field	Value	Language
dc.contributor.author	양재웅	-
dc.contributor.author	노대호	-
dc.contributor.author	윤진국	-
dc.contributor.author	김재수	-
dc.date.accessioned	2024-01-21T09:01:22Z	-
dc.date.available	2024-01-21T09:01:22Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2003-05	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/138594	-
dc.title	A study on the low temperature growth of SiC film with a 1,3-DSB precursor	-
dc.title.alternative	단일전구체 (1,3-DBS)에 의한 저온 SiC 박막 성장에 관한 연구	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국표면공학회지 = J. Kor. Inst. Surf. Eng., v.36, no.2, pp.141 - 147	-
dc.citation.title	한국표면공학회지 = J. Kor. Inst. Surf. Eng.	-
dc.citation.volume	36	-
dc.citation.number	2	-
dc.citation.startPage	141	-
dc.citation.endPage	147	-
dc.subject.keywordAuthor	SiC	-
dc.subject.keywordAuthor	CVD	-
dc.subject.keywordAuthor	precursor	-

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