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Role of AlN Piezoelectric Crystal Orientation in Solidly Mounted Film Bulk Acoustic Wave Resonator

Authors

이시형; 강성철; 한상철; 주병권; 윤기현; 이전국

Issue Date

2003-04

Publisher

한국세라믹학회

Citation

한국세라믹학회지, v.40, no.4, pp.393 - 397

Keywords

AlN; solidly mounted resonator

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/138699

Appears in Collections:

KIST Article > 2003

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